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Success Story: SECS/GEM Integration on KLA-Tencor 5300 Overlay Using EIGEMBox

- Technology & Research
https://www.einnosys.com/secs-gem-integration-kla-tencor-5300-eigembox/
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Seamlessly Upgrading Legacy Tools: SECS/GEM Integration on KLA-Tencor 5300 Overlay Tool

Discover how Einnosys transformed a legacy KLA-Tencor 5300 Overlay tool into a modern, SECS/GEM-compliant system. With EIGEMBox, the tool now features real-time data exchange, improved monitoring, and 50% faster setup times—all without disrupting production. Learn more about this cost-effective and efficient Industry 4.0 upgrade.

Category : Technology & Research

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